Cross-section analysis can locate a defect between layers and help identify the process-flow section where it originated.

“We'll cross-section it. You were in the, uh, TEM lab yesterday, and you saw how you can get cross-sections. You'll get a cross-section of a defect, and you'll-- from that you'll be able to say, "Oh, that defect is between these layers, so it must have come from this section of the flow.”